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In this case, the hollows are connected ADTEC AD-UDSW. In the case of the CCH, the discharge brightness is enhanced and the plasma density is twice as high as that in the case of plane parallelplate discharge at the same input rf power. Electrodes for this discharge are shown in Fig.

Advanced Plasma Technology

An equivalent circuit for this situation of discharge is ADTEC AD-UDSW in Fig. We have proposed a quite simple method of plasma production under high atmospheric gas pressure.

Pole-type electrodes, which are coupled with external capacitors, are set near a ADTEC AD-UDSW plate. This arrangement is just a direct realization of the circuit in Fig. This is called capacity-coupled multi-discharge CCMD [12]. Under some conditions, the pole length is set to be so short that the electrodes are almost small ADTEC AD-UDSW.

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Being different from the barrier discharges, the discharge power of the ADTEC AD-UDSW can be externally controlled to increase by increasing the capacity of the capacitors. Measurements have proved that the CCMD provides high-power discharges, suggesting new possibilities for plasma applications in the high atmospheric pressure range.


Here are demonstrated two methods adopted ADTEC AD-UDSW electron-temperature control, which might be useful in next-stage plasma processing. One of them is accomplished by using a pin-hollow cathode while the other employs a mesh grid.

Both methods are based ADTEC AD-UDSW trapping of electrons ionized in discharge-free region, which is provided by varying a local discharge structure. Therefore, in both methods, there appears a region of low ADTEC AD-UDSW temperature in addition to the discharge region of high electron temperature.

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The volume ratio of these regions is important and has to be carefully determined in ADTEC AD-UDSW applications for plasma processing. Our methods suggest a general principle of electron-temperature control in low-pressure discharge plasmas. A schematic feature of the pin-hollow cathode action for low-pressure DC discharges is demonstrated in Fig. In a typical setup, the cathode consists of 20 cm diameter stainless steel cylinder with 17 cm diameter hole at the front edge and 0.

The 48 pins, connected electrically with the cylinder, are set with an equal separation on a 16 cm diameter circle. The pin length d is varied from ADTEC AD-UDSW to 7 cm. As found in Fig. With an increase in d, the glow becomes weak gradually in the radial core part of the ADTEC AD-UDSW. The core Fig.

As d is increased, the electron temperature Te is observed to decrease drastically, being accompanied by ADTEC AD-UDSW slight increase in the plasma density np in this core plasma. This result is ascribed to trapping of primary electrons in the potential-hill structure formed by the pins in the cathode. A typical example of electron-temperature effects is presented in Fig. In the pure Ar discharge, the Langmuir probe shows a ADTEC AD-UDSW decrease in Te.

On the other hand, in the presence of a small amount of CH4, the probe shows a drastic decrease in the negative current, suggesting production of negative ions.

There also appears a drastic change in the ADTEC AD-UDSW of radical species in ADTEC AD-UDSW kind of reactive plasma [15]. A grid is employed in the other method, which separates the discharge region I from the region II for plasma processing [16]. As shown in Fig.

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Ionization occurs due to the tail electrons in the region II. Electrons ADTEC AD-UDSW there are not responsible for maintaining the discharge, having a low Te.


Therefore, Te in the region II decreases with an increase in the negative grid potential. As z is increased, ADTEC AD-UDSW density increases while high-energy electrons disappear gradually.

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